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Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges

机译：用于低压测量范围的电容式压力传感器的设计，制造和测试

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Vasileios Mitrakos; Lisa Macintyre; Fiona C. Denison; Philip J.W. Hands; Marc P.Y. Desmulliez;
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年度 2017
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1. Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges [J] . Marc P.Y. Desmulliez, Vasileios Mitrakos, Philip J.W. Hands, Micromachines . 2017,第2期

机译：用于低压测量范围的电容式压力传感器的设计，制造和测试
2. Low-Pressure Wafer-Level-Packaged Capacitive Accelerometers With High Dynamic Range and Wide Bandwidth Using Nano-Gap Sloped Electrode Design [J] . Yaesuk Jeong, Diego Emilio Serrano, Farrokh Ayazi Microelectromechanical Systems, Journal of . 2017,第6期

机译：采用纳米间隙倾斜电极设计的，具有高动态范围和宽带宽的低压晶圆级封装电容式加速度计
3. A flexible PDMS capacitive tactile sensor with adjustable measurement range for plantar pressure measurement [J] . Kin Fong Lei, Kun-Fei Lee, Ming-Yih Lee Microsystem technologies . 2014,第7期

机译：灵活的PDMS电容式触觉传感器，可调节量程，用于足底压力测量
4. Design for 1μbar resolution pressure measurement and display ASIC for MEMS capacitive pressure sensor [C] . Eswaran P., Sivasankar S., Malarvizhi S. International conference on control, instrumentation, communication and computational technologies . 2014

机译：用于MEMS电容式压力传感器的1μbar分辨率压力测量和显示ASIC设计
5. Development, validation and testing of a new sensor array for intra-artricular pressure measurement: In-vitro human lumbar spine intra-articular facet testing. [D] . Welcher, Judson B. 2011

机译：用于关节内压力测量的新型传感器阵列的开发，验证和测试：体外人腰椎关节内小平面测试。
6. Design Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges [O] . Vasileios Mitrakos, Lisa Macintyre, Fiona C. Denison, 2017

机译：用于低压测量范围的电容式压力传感器的设计制造和测试
7. Design, manufacture and testing of capacitive pressure sensors for low-pressure measurement ranges [O] . Mitrakos, Vasileios, Macintyre, Lisa, Denison, Fiona, 2017

机译：设计，制造和测试用于低压测量范围的电容式压力传感器

Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges

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